Design of a high-Q, low-impedance, GHz-range piezoelectric mems resonator

Author

Antkowiak, B. ; Gorman, J.P. ; Varghese, Merin ; Carter, D.J.D. ; Duwel, A.E.

Author_Institution

Charles Stark Draper Lab., Cambridge, MA, USA

Volume

1

fYear

2003

Firstpage

841

Abstract

In this paper, we present useful modeling procedures intended to characterize and optimize MEMS resonator-filter designs. We address two major areas: (1) the impedance of the resonators as a function of frequency, assuming a given damping value, and (2) the numerical calculation of resonator Quality factor (Q) due to known damping mechanisms. The impedance calculation procedure is targeted towards piezoelectric MEMS resonators, while the Q calculations are more general. We show how these modeling approaches have been used to design and optimize our piezoelectric resonator for high Q and low impedance in the GHz frequency range.

Keywords

Q-factor; crystal filters; crystal resonators; damping; micromechanical resonators; numerical analysis; GHz-range piezoelectric MEMS resonator; damping; high-Q piezoelectric MEMS resonator; impedance calculation; low-impedance piezoelectric MEMS resonator; numerical calculation; optimize MEMS resonator-filter designs; quality factor; Boundary conditions; Damping; Design optimization; Electrodes; Frequency; Impedance; Iron; Laplace equations; Micromechanical devices; Q factor;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1215606

Filename

1215606