Title :
Vertically supported microresonators
Author :
Lee, K.B. ; Lin, L.
Author_Institution :
Dept. of Mech. Eng., California Univ., Berkeley, CA, USA
Abstract :
Vertically supported, comb-shape microresonators with the feasibility of actuation in two perpendicular directions have been demonstrated. The microstructure is made of 2-/spl mu/m thick polysilicon by a standard surface micromachining process and is vertically lifted and fixed with the assistance of locking springs and micro hinges. With DC bias voltage of 10V and AC driving voltage of 10V, peak-to-peak, under atmospheric pressure, the resonator vibrates in parallel to the comb finger direction at 7.75 kHz with measured amplitude of 3.3 /spl mu/m and quality factor of 67. When actuated in the direction normal to the surface of comb finger, the resonator vibrates at 2 kHz with vibration amplitudes of 11.2 /spl mu/m and 10.5 /spl mu/m, respectively for the two opposite, comb-shape microstructures. The potential applications of these vertically supported microresonators are in the areas of MOEMS (Micro-opto-electro-mechanical Systems) devices such as optical systems on a chip.
Keywords :
Q-factor; elemental semiconductors; fasteners; micro-optics; micromachining; micromechanical resonators; silicon; 10 V; 10.5 micron; 11.2 micron; 2 kHz; 2 micron; 3.3 micron; 7.75 kHz; AC driving voltage; DC bias voltage; Si; atmospheric pressure; chip; comb finger direction; comb-shape microresonators; comb-shape microstructure; locking springs; micro hinges; micro opto-electro-mechanical system devices; optical systems; polysilicon; quality factor; resonator vibration; surface micromachining process; vertically supported microresonators; vibration amplitude; Atmospheric measurements; Fasteners; Fingers; Microcavities; Micromachining; Microstructure; Optical devices; Optical resonators; Springs; Voltage;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215607
