Microfabricated near-field microwave probes for scanning microscopy

Author

Wang, Y. ; Tabib-Azar, M.

Author_Institution

Dept. of Electr. Eng.& Comput. Sci., Case Western Reserve Univ., Cleveland, OH, USA

Volume

1

fYear

2003

Firstpage

855

Abstract

The design and microfabrication of a silicon co-axial scanning near-field microwave probe (SNMP) compatible with atomic force microscope (AFM) system are reported. Scanning near-field microwave microscopy (SNMM) imaging is suitable for nondestructive surface and subsurface characterization of materials over a wide frequency range-between 0.1 GHz and 300 GHz, which bridges the frequency gap among other scanning local probe microscopy (SLPM) methods. The microfabricated SNMP consists of a silicon (Si) V-shaped cantilever beam, a co-axial tip, and aluminum waveguides. The design and microfabrication procedure are described. Mechanical and electrical characterizations, and simultaneous contact AFM and SNMM surface imaging are presented.

Keywords

atomic force microscopy; elemental semiconductors; micromechanical devices; microwave imaging; nondestructive testing; probes; silicon; 0.1 to 300 GHz; AFM; aluminum waveguides; atomic force microscopy; coaxial tip; electrical characterization; frequency gap; mechanical characterization; nondestructive surface characterisation; scanning local probe microscopy; scanning near-field microwave microscopy imaging; silicon coaxial scanning near-field microwave probes; subsurface characterization; v-shaped cantilever beam; Aluminum; Atomic force microscopy; Bridges; Contacts; Frequency; Microwave imaging; Microwave theory and techniques; Probes; Silicon; Structural beams;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1215609

Filename

1215609