The radial bulk annular resonator: towards a 50/spl Omega/ RF MEMS filter

Author

Bircumshaw, B. ; Liu, G. ; Takeuchi, H. ; Tsu-Jae King ; Howe, R. ; O´Reilly, O. ; Pisano, A.

Author_Institution

Dept. of Mech. Eng., California Univ., Berkeley, CA, USA

Volume

1

fYear

2003

Firstpage

875

Abstract

This paper presents a new electrostatic RF MEMS resonator design: the radial bulk annular resonator (RBAR). The RBAR utilizes the bulk radial resonant modes of an annulus. The theory behind the RBAR, and its predecessor the bulk longitudinal resonator (BLR), will be developed and discussed. It is found that the RBAR is capable of achieving an arbitrarily low motional resistance for any desired resonant frequency at the cost of increased average annular radius. This feature makes the RBAR attractive for minimizing insertion loss in bandpass filters.

Keywords

micromechanical resonators; resonator filters; RF MEMS filter; arbitrarily low motional resistance; electrostatic RF MEMS resonator design; insertion loss; radial bulk annular resonator; Electrostatics; Fabrication; Film bulk acoustic resonators; Micromechanical devices; Piezoelectric films; Radio frequency; Radiofrequency microelectromechanical systems; Resonant frequency; Resonator filters; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1215614

Filename

1215614