A 5-17 GHz wideband reflection-type phase shifter using digitally operated capacitive MEMS switches

Author

Jung-Mu Kim ; Sanghyo Lee ; Jae-Hyoung Park ; Chang-Wook Baek ; Youngwoo Kwon ; Yong-Kweon Kim

Author_Institution

Sch. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., South Korea

Volume

1

fYear

2003

Firstpage

907

Abstract

In this paper, a micromachined low-loss and ultra wideband reflection-type phase shifter (RTPS) is proposed. The phase shifter shows a constant phase shift from 5 to 17 GHz and consists of two cascaded reflection-type phase shifter. Low-loss reflection termination consists of digital capacitive switches, and air-gap overlay CPW couplers are used in order to employ the low-loss 3 dB coupling. The fabricated phase shifter showed the 5 discrete states, 0/spl deg/, 22.5/spl deg/, 45/spl deg/, 67.5/spl deg/, 90/spl deg/ respectively, the average insertion loss of 3.48 dB, and maximum rms phase error of /spl plusmn/ 1.80/spl deg/ for the relative phase sift from 0/spl deg/ to 90/spl deg/ over 5-17GHz.

Keywords

capacitors; coplanar waveguides; microswitches; phase shifters; waveguide couplers; 3.48 dB; 5 to 17 GHz; CPW couplers; MEMS switches; digital capacitive switches; phase error; phase shift; wideband reflection-type phase shifter; Air gaps; Coplanar waveguides; Couplers; Insertion loss; Microswitches; Phase shifters; Reflection; Switches; Termination of employment; Ultra wideband technology;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1215622

Filename

1215622