Design and experiments of bio-mimicry sound source localization sensor with gimbal-supported circular diaphragm

We propose a novel structure for sound source localization by mimicking an auditory organ of a parasitoid fly. It is based on lateral gradients of sound pressure from a non-frontal source. The gimbal-supported circular diaphragm is very suitable for detecting the small gradients and miniaturizing into a micro sensor. We describe the design method and FEM analysis of the diaphragm structure. We show fabrication of two types of sensors, a scaled-up type and a surface-micromachined type, and the experimental results.