• DocumentCode
    1702093
  • Title

    Direct and inverse problems of liquid-phase epitaxy

  • Author

    Badratinova, L.G. ; Kuznetsov, V.V. ; Petrova, A.G. ; Pukhnachov, V.V.

  • Author_Institution
    Novosibirsk State University
  • fYear
    1987
  • Firstpage
    136
  • Lastpage
    141
  • Abstract
    The direct and inverse problems are used to describe the growth of the complex binary film from the triple solution by the method of liquid epitaxy. The numerical calculations for a direct problem have already been suggested. There it has been proposed that a liquid solution consists of dissociated elements A, B, C, and the AxBl-xC films consists of binary compounds AC and BC (where x is the fraction of AC molecules per unit volume of the film). The results of this paper are applicable to the growth from the solutions with components A, B, C, such as AC, B, C, as well as from the solutions with fully assosiated elements AC, BC in the solvent C.
  • Keywords
    Chemicals; Epitaxial growth; Hydrodynamics; Inverse problems; Solids; Solvents;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Numerical Analysis of Semiconductor Devices and Integrated Circuits, 1987. NASECODE V. Proceedings of the Fifth International Conference on the
  • Conference_Location
    Dublin, Ireland
  • Print_ISBN
    0-906783-72-0
  • Type

    conf

  • DOI
    10.1109/NASCOD.1987.721133
  • Filename
    721133