Title :
Direct and inverse problems of liquid-phase epitaxy
Author :
Badratinova, L.G. ; Kuznetsov, V.V. ; Petrova, A.G. ; Pukhnachov, V.V.
Author_Institution :
Novosibirsk State University
Abstract :
The direct and inverse problems are used to describe the growth of the complex binary film from the triple solution by the method of liquid epitaxy. The numerical calculations for a direct problem have already been suggested. There it has been proposed that a liquid solution consists of dissociated elements A, B, C, and the AxBl-xC films consists of binary compounds AC and BC (where x is the fraction of AC molecules per unit volume of the film). The results of this paper are applicable to the growth from the solutions with components A, B, C, such as AC, B, C, as well as from the solutions with fully assosiated elements AC, BC in the solvent C.
Keywords :
Chemicals; Epitaxial growth; Hydrodynamics; Inverse problems; Solids; Solvents;
Conference_Titel :
Numerical Analysis of Semiconductor Devices and Integrated Circuits, 1987. NASECODE V. Proceedings of the Fifth International Conference on the
Conference_Location :
Dublin, Ireland
Print_ISBN :
0-906783-72-0
DOI :
10.1109/NASCOD.1987.721133