DocumentCode
1702093
Title
Direct and inverse problems of liquid-phase epitaxy
Author
Badratinova, L.G. ; Kuznetsov, V.V. ; Petrova, A.G. ; Pukhnachov, V.V.
Author_Institution
Novosibirsk State University
fYear
1987
Firstpage
136
Lastpage
141
Abstract
The direct and inverse problems are used to describe the growth of the complex binary film from the triple solution by the method of liquid epitaxy. The numerical calculations for a direct problem have already been suggested. There it has been proposed that a liquid solution consists of dissociated elements A, B, C, and the AxBl-xC films consists of binary compounds AC and BC (where x is the fraction of AC molecules per unit volume of the film). The results of this paper are applicable to the growth from the solutions with components A, B, C, such as AC, B, C, as well as from the solutions with fully assosiated elements AC, BC in the solvent C.
Keywords
Chemicals; Epitaxial growth; Hydrodynamics; Inverse problems; Solids; Solvents;
fLanguage
English
Publisher
ieee
Conference_Titel
Numerical Analysis of Semiconductor Devices and Integrated Circuits, 1987. NASECODE V. Proceedings of the Fifth International Conference on the
Conference_Location
Dublin, Ireland
Print_ISBN
0-906783-72-0
Type
conf
DOI
10.1109/NASCOD.1987.721133
Filename
721133
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