PhC structures for optoelectronics

Author

Pudis, D. ; Lettrichova, Ivana ; Jandura, D. ; Suslik, L. ; Gaso, P. ; Martincek, Ivan ; Skriniarova, J. ; Kovac, J. ; Novak, Jiri

Author_Institution

Dept. of Phys., Univ. of Zilina, Zilina, Slovakia

fYear

2014

fDate

19-20 May 2014

Firstpage

16

Lastpage

19

Abstract

In this paper we present optical technologies, which can be applicable for fabrication of planar photonic crystals (PhCs). We focus on basic description of interference and near-field scanning optical microscope lithography and direct laser writing process. We also show possibilities and results obtained by application of PhC on light emitting diode surface and their emission properties.

Keywords

integrated optics; integrated optoelectronics; laser materials processing; light emitting diodes; light interference; optical fabrication; photolithography; photonic crystals; PhC Structures; direct laser writing; emission properties; interference; light emitting diode; near-field scanning optical microscope lithography; optoelectronics; planar photonic crystals; Light emitting diodes; Mirrors; Optical variables measurement; Photonics; Resists; Semiconductor lasers; Surface treatment; NSOM lithography; interference lithography; light emitting diode; photonic structure;

fLanguage

English

Publisher

ieee

Conference_Titel

ELEKTRO, 2014

Conference_Location

Rajecke Teplice

Print_ISBN

978-1-4799-3720-2

Type

conf

DOI

10.1109/ELEKTRO.2014.6847861

Filename

6847861