A digital test structure for simultaneous bird´s beak length and misalignment measurement in polysilicon emitter bipolar technologies

Author

Ullán, M. ; Lozano, M. ; Santander, J. ; Lora-Tamayo, E. ; Nigrin, S. ; Osborne, P.H.

Author_Institution

Centro Nacional de Microelectron., Univ. Autonoma de Barcelona, Spain

fYear

1997

Firstpage

25

Lastpage

30

Abstract

A test structure for geometrical measurements on bipolar processes is presented. Both bird´s beak length and misalignment between active areas and active area openings in a polysilicon emitter bipolar technology can be obtained from a unique measurement using it. Although it is a digital structure, the accuracy can be improved by means of a fitting on the contact resistance values. Another structure for obtaining misalignment, based on the voltage-dividing potentiometer principle, is included in order to compare results

Keywords

bipolar integrated circuits; contact resistance; electric resistance measurement; integrated circuit measurement; integrated circuit testing; Si; active area openings; bird´s beak length; bird´s beak misalignment; contact resistance values; digital test structure; geometrical measurements; polysilicon emitter bipolar technologies; voltage-dividing potentiometer principle; Area measurement; Contact resistance; Electrical resistance measurement; Force measurement; Geometry; Length measurement; Microelectronics; Potentiometers; Testing; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Test Structures, 1997. ICMTS 1997. Proceedings. IEEE International Conference on

Conference_Location

Monterey, CA

Print_ISBN

0-7803-3243-1

Type

conf

DOI

10.1109/ICMTS.1997.589314

Filename

589314