DocumentCode
1702972
Title
IEE Colloquium on `Microengineering - the Future!´ (Digest No.1993/182)
fYear
1993
fDate
10/13/1993 12:00:00 AM
Abstract
The following topics were dealt with: microengineering; microengineering technology in aerospace sensors; systems applications in automobile and avionics markets; microengineering technologies and capabilities; microfabrication of actuators; laser and electron beam lensed LIGA processes; and techniques for combining active devices with micromachined structures
Keywords
aircraft instrumentation; automotive electronics; electric actuators; electric sensing devices; electron beam lithography; micromechanical devices; photolithography; small electric machines; active devices; actuators; aerospace sensors; automobile; avionics markets; electron beam lensed LIGA processes; laser beam based LIGA process; microengineering technology; microfabrication; micromachined structures; systems applications;
fLanguage
English
Publisher
iet
Conference_Titel
Microengineering - the Future!, IEE Colloquium on
Conference_Location
London
Type
conf
Filename
280335
Link To Document