DocumentCode
1703575
Title
Simulation of an analog differential capacitive accelerometer
Author
Ahanchian, Ali ; Majlis, Burhanuddin Yeop
Author_Institution
Inst. of Microengineering & Nanoelectronics, Univ. Kebangsaan Malaysia, Selangor, Malaysia
fYear
2004
Abstract
In this paper, the simulation of an open-loop MEMS capacitive accelerometer in OrCAD (PSPICE A/D), include readout interface are presented. The charge amplifier technique is used for converting the capacitance change of accelerometer to electrical signal. The sensing element is modelled in system behavioural level of PSPICE and the interface circuit is modelled at component level.
Keywords
accelerometers; capacitive sensors; microsensors; transfer functions; MEMS capacitive accelerometer; OrCAD technology; PSPICE A-D technology; charge amplifier technique; electrical signals; readout interface; Acceleration; Accelerometers; Capacitance; Capacitors; Circuits; Damping; Electrostatics; Frequency; Micromechanical devices; SPICE;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Electronics, 2004. ICSE 2004. IEEE International Conference on
Print_ISBN
0-7803-8658-2
Type
conf
DOI
10.1109/SMELEC.2004.1620899
Filename
1620899
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