Title :
Suspension design analysis on the performance of MEMS area-changed lateral capacitive accelerometer
Author :
Bais, Badariah ; Majlis, Burhanuddin Yeop
Author_Institution :
Inst. of Microengineering & Nanoelectronics, Univ. Kebangsaan Malaysia, Selangor, Malaysia
Abstract :
In this paper, variations of folded beam suspension design are analyzed and simulated in order to study its effect on the performance of an area-changed MEMS lateral capacitive accelerometer. The simulation was carried out using Coventorware2003. Mechanical issues like spring constants, stress distributions, cross-axis sensitivities and shock survivability are discussed.
Keywords :
accelerometers; capacitive sensors; microsensors; suspensions (mechanical components); MEMS accelerometers; capacitive accelerometer; cross-axis sensitivities; folded beam suspension design; shock survivability; spring constants; stress distributions; Acceleration; Accelerometers; Analytical models; Electric shock; Electrodes; Fingers; Micromechanical devices; Performance analysis; Springs; Stress;
Conference_Titel :
Semiconductor Electronics, 2004. ICSE 2004. IEEE International Conference on
Print_ISBN :
0-7803-8658-2
DOI :
10.1109/SMELEC.2004.1620900
