DocumentCode
1703676
Title
Suspension design analysis on the performance of MEMS area-changed lateral capacitive accelerometer
Author
Bais, Badariah ; Majlis, Burhanuddin Yeop
Author_Institution
Inst. of Microengineering & Nanoelectronics, Univ. Kebangsaan Malaysia, Selangor, Malaysia
fYear
2004
Abstract
In this paper, variations of folded beam suspension design are analyzed and simulated in order to study its effect on the performance of an area-changed MEMS lateral capacitive accelerometer. The simulation was carried out using Coventorware2003. Mechanical issues like spring constants, stress distributions, cross-axis sensitivities and shock survivability are discussed.
Keywords
accelerometers; capacitive sensors; microsensors; suspensions (mechanical components); MEMS accelerometers; capacitive accelerometer; cross-axis sensitivities; folded beam suspension design; shock survivability; spring constants; stress distributions; Acceleration; Accelerometers; Analytical models; Electric shock; Electrodes; Fingers; Micromechanical devices; Performance analysis; Springs; Stress;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Electronics, 2004. ICSE 2004. IEEE International Conference on
Print_ISBN
0-7803-8658-2
Type
conf
DOI
10.1109/SMELEC.2004.1620900
Filename
1620900
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