Title :
Fabrication Technology For Monolithic GaAs VFETs*
Author :
Clarke, R.C. ; Driver, M.C. ; O´Keeffe, T.W. ; Wickstrom, R.A.
Author_Institution :
Westinghouse Research and Development Center
Keywords :
Bonding; Bridge circuits; Capacitance; FETs; Fabrication; Feedback; Gallium arsenide; Impedance; MESFETs; Substrates;
Conference_Titel :
High Speed Semiconductor Devices and Circuits, 1987. Proceedings., IEEE/Cornell Conference on Advanced Concepts in
DOI :
10.1109/CORNEL.1987.721242
