BaTiO3 nanocomposite thin film as pyroelectric sensor

BaTiO₃ thin films are commonly used as a pyroelectric sensor because this material has a good dielectric, ferroelectric and piezoelectric properties. This paper reports the pyroelectric sensor performance of BaTiO₃ nanocomposite thin films. The BaTiO₃ nanoparticles were synthesized and deposited as nanocomposite thin films on Si/SiO₂/RuO₂ substrate using spin coating technique. The deposited films were dried at 200 C for 2 hours and annealed at 700 C for 1 hour in air. Pyroelectric performance of the fabricated sensor was carried out at temperature in the range of 30 to 58 C using short-circuit current method. The heating rate was set up to 0.4 C/s. It was found the device showed the pyroelectric response when heated and the pyroelectric coefficients of the device are in the range of 43-1300μC cm^-2K^-2.