Title :
Low pressure sensing in medical applications
Author_Institution :
Data Instrum., UK
fDate :
6/21/1905 12:00:00 AM
Abstract :
Silicon sensing elements remain one of the least expensive technologies for sensing and as a result this dual sensing element can be offered for a small cost differential to that of traditional single element silicon sensors. A typical 4-inch silicon wafer yields over 1000 die at a cost, which is typically less than $0.50 each. The use of two sensing elements in low cost packaging makes dynamically compensated sensors a cost-effective solution. The miniature printed circuit board mountable sensor shown in a figure is priced at under $15 in OEM quantities
Keywords :
pressure sensors; 4 in; Si; cost-effective solution; dynamically compensated sensors; low cost packaging; low pressure sensing; medical applications; miniature printed circuit board mountable sensor; silicon sensing elements;
Conference_Titel :
Innovative Pressure, Force and Flow Measurements (Ref. No. 1999/089), IEE Colloquium on
Conference_Location :
London
DOI :
10.1049/ic:19990492