• DocumentCode
    1704734
  • Title

    Low pressure sensing in medical applications

  • Author

    White, W.T.

  • Author_Institution
    Data Instrum., UK
  • fYear
    1999
  • fDate
    6/21/1905 12:00:00 AM
  • Firstpage
    42401
  • Lastpage
    42403
  • Abstract
    Silicon sensing elements remain one of the least expensive technologies for sensing and as a result this dual sensing element can be offered for a small cost differential to that of traditional single element silicon sensors. A typical 4-inch silicon wafer yields over 1000 die at a cost, which is typically less than $0.50 each. The use of two sensing elements in low cost packaging makes dynamically compensated sensors a cost-effective solution. The miniature printed circuit board mountable sensor shown in a figure is priced at under $15 in OEM quantities
  • Keywords
    pressure sensors; 4 in; Si; cost-effective solution; dynamically compensated sensors; low cost packaging; low pressure sensing; medical applications; miniature printed circuit board mountable sensor; silicon sensing elements;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Innovative Pressure, Force and Flow Measurements (Ref. No. 1999/089), IEE Colloquium on
  • Conference_Location
    London
  • Type

    conf

  • DOI
    10.1049/ic:19990492
  • Filename
    828749