Design and simulation of simple and varying section cantilever and fixed-fixed end types MEMS switches

Author

Afrang, Saeid ; Rezazadeh, Ghader

Author_Institution

Dept. of Electr. Eng., Urmia Univ., Iran

fYear

2004

Abstract

This paper reports on the design and simulation of simple and varying section cantilever and fixed-fixed end types MEMS switches. First the electromechanical design and simulation of simple cantilever and fixed-fixed ends type MEMS switches is presented, and the effect of electrostatic area and its location on the switching voltage is investigated. Then the governing equations for spring-constant of varying section cantilever and fixed-fixed end types MEMS switches is derived by energy method and Euler-Bernoulli theory. The switching voltage of mentioned constructions for MEMS switches is determined by design and simulation methods and the results of these methods are compared.

Keywords

cantilevers; microswitches; Euler-Bernoulli theory; electromechanical design; electromechanical simulation; electrostatic area; energy method; fixed-fixed end types MEMS switch; simple cantilever; spring-constant; switching voltage; varying section cantilever; Design methodology; Electrostatics; Energy consumption; Equations; Mechanical engineering; Microswitches; Residual stresses; Springs; Structural beams; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Electronics, 2004. ICSE 2004. IEEE International Conference on

Print_ISBN

0-7803-8658-2

Type

conf

DOI

10.1109/SMELEC.2004.1620956

Filename

1620956