Finger beam geometrical behavior analysis of a non-crossing differential capacitive MEMS accelerometer

The main objective of this work is to perform a feasibility study on the geometrical behavior of finger beam of a non-crossing differential capacitive accelerometer. The non-crossing differential capacitive accelerometer has an advantage as to the crossing differential capacitive type because of its linear sensitivity. This paper discusses the effect of a beam deflection in designing a MEMS accelerometer due to the acceleration and the reactive force. From the simulation, the optimum geometrical size found is 200 μm finger length with width varies from 1.75 μm to 2.5 μm.