Title :
Modeling and simulation of 2 MHz external antenna for RF driven H− ion source
Author :
Gunele, Nayan Kumar ; Bhongade, Sandeep ; Ghodke, D.V. ; Vadjikar, R.M. ; Senecha, V.K. ; Joshi, S.C.
Author_Institution :
Electr. Eng. Dept., SGSITS, Indore, India
Abstract :
The modeling and simulation of external antenna is important for the study of RF driven hydrogen plasma sources. The external antenna will be externally wrapped around plasma chamber. RF pulsed power feeding at 2 MHz frequency to antenna for plasma generation (ionisation) and heat up through inductive coupling. This antenna has been modeled and simulated with Opera-3D simulation platform using TOSCA module. This simulation will help to study the magnetic field behaviour and determination of electrical parameters of antenna. The analysis has been carried out by considering current of 400 Amp in antenna, the results are reported in the paper.
Keywords :
antenna feeds; plasma devices; plasma production; Opera-3D simulation platform; RF driven H- ion source; RF driven hydrogen plasma sources; RF pulsed power; TOSCA module; antenna electrical parameter determination; current 400 A; external antenna modelling; external antenna simulation; frequency 2 MHz; inductive coupling; magnetic field behaviour; plasma chamber; plasma generation; Analytical models; Antennas; Conductors; Ion sources; Magnetic fields; Plasmas; Radio frequency; H− ion source; Inductivelly Coupled Plasma; Opera-3D; RF Antenna; inductive coupling;
Conference_Titel :
Applied Electromagnetics Conference (AEMC), 2013 IEEE
Conference_Location :
Bhubaneswar
Print_ISBN :
978-1-4799-3266-5
DOI :
10.1109/AEMC.2013.7045024
