• DocumentCode
    1706901
  • Title

    Neutral Depletion and Transport Mechanisms in Large-Area High Density Plasma Sources

  • Author

    Tynan, G.R.

  • Author_Institution
    University of California
  • fYear
    1999
  • Firstpage
    85
  • Lastpage
    85
  • Abstract
    Summary form only as given.
  • Keywords
    Aerospace engineering; Fault location; Inductors; Plasma density; Plasma materials processing; Plasma sources; Plasma transport processes; Pressure gauges; Semiconductor device modeling;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1999. ICOPS '99. IEEE Conference Record - Abstracts. 1999 IEEE International Conference on
  • Conference_Location
    Monterey, CA, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-5224-6
  • Type

    conf

  • DOI
    10.1109/PLASMA.1999.829274
  • Filename
    829274
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1706901