Title :
Neutral Depletion and Transport Mechanisms in Large-Area High Density Plasma Sources
Author_Institution :
University of California
Abstract :
Summary form only as given.
Keywords :
Aerospace engineering; Fault location; Inductors; Plasma density; Plasma materials processing; Plasma sources; Plasma transport processes; Pressure gauges; Semiconductor device modeling;
Conference_Titel :
Plasma Science, 1999. ICOPS '99. IEEE Conference Record - Abstracts. 1999 IEEE International Conference on
Conference_Location :
Monterey, CA, USA
Print_ISBN :
0-7803-5224-6
DOI :
10.1109/PLASMA.1999.829274
