Title :
Contactless characterization of MEMS devices using optical microscopy
Author :
Timár, András ; Bognar, Gabor
Author_Institution :
Dept. of Electron Devices, Tech. Univ. of Budapest, Budapest
Abstract :
In this paper a new approach for measuring depth values of cavities of micro-electro mechanical system (MEMS) is presented. This measurement was done by using a simple optical microscope and image processing techniques. The sample need not to be treated with any foreign material such as reflective or conductive coating.
Keywords :
image processing; micromechanical devices; optical images; optical microscopy; spatial variables measurement; MEMS device; depth measurement; image processing technique; microelectro mechanical system; optical microscope; Coatings; Conducting materials; Image processing; Mechanical systems; Mechanical variables measurement; Microelectromechanical devices; Micromechanical devices; Optical devices; Optical materials; Optical microscopy; 2-D DFT; FFT; MEMS characterization; depth measurement; edge detection; height map; image processing;
Conference_Titel :
Design and Diagnostics of Electronic Circuits & Systems, 2009. DDECS '09. 12th International Symposium on
Conference_Location :
Liberec
Print_ISBN :
978-1-4244-3341-4
Electronic_ISBN :
978-1-4244-3340-7
DOI :
10.1109/DDECS.2009.5012130
