2D electromagnetic PIC-MCC simulation of the initiation of a large area surface wave sustained plasma source

Summary form only given, as follows. A 2D electromagnetic PIC-MCC simulation of a large area plasma source is being performed. In this simulation, the plasma is contained in a metal bound cylindrical region. In one version, the plasma is excited by a ring slot on top of the chamber by oscillatory radial electric fields across the slot. The simulation demonstrates the initiation and fill-in process of a slot excited surface wave sustained plasma source. The steady state density is compared with the predictions of a simple model of the diffusion of the plasma from the source. In the diffusion model, plasma undergoes ambipolar diffusion and is only lost at the walls. Also, the role of electromagnetic effects, such as ponderomotive forces, in the initiation and fill-in are explored.