• DocumentCode
    1709485
  • Title

    Detection of Trivelpiece-Gould modes in helicon discharges

  • Author

    Blackwell, D.D. ; Madziwa, T.G. ; Armush, D. ; Chen, Francis F.

  • Author_Institution
    California Univ., Los Angeles, CA, USA
  • fYear
    1999
  • Firstpage
    144
  • Abstract
    Summary form only given. That helicon discharges produce higher plasma densities than unmagnetized inductively coupled plasmas (ICPs) is well known in the plasma processing community. A reason for the high RF coupling efficiency in these discharges has been suggested by Shamrai et al. (1997); namely, that helicon waves, though weakly damped themselves, can transfer their energy at the boundary to electrostatic electron cyclotron waves [called Trivelpiece-Gould (TG) modes in confined cylinders], and these, in turn, are rapidly damped as they propagate inward toward the axis. To test this hypothesis, we have performed an experiment to detect the TG waves directly.
  • Keywords
    damping; discharges (electric); helicons; plasma confinement; plasma density; plasma diagnostics; plasma electrostatic waves; plasma instability; Trivelpiece-Gould modes; boundary; confined cylinders; electrostatic electron cyclotron waves; energy transfer; helicon discharges; helicon waves; plasma densities; plasma processing community; unmagnetized inductively coupled plasmas; wave propagation; weakly damped waves; Cyclotrons; Electrons; Electrostatics; Performance evaluation; Plasma confinement; Plasma density; Plasma materials processing; Plasma waves; Radio frequency; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1999. ICOPS '99. IEEE Conference Record - Abstracts. 1999 IEEE International Conference on
  • Conference_Location
    Monterey, CA, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-5224-6
  • Type

    conf

  • DOI
    10.1109/PLASMA.1999.829384
  • Filename
    829384