DocumentCode :
1709485
Title :
Detection of Trivelpiece-Gould modes in helicon discharges
Author :
Blackwell, D.D. ; Madziwa, T.G. ; Armush, D. ; Chen, Francis F.
Author_Institution :
California Univ., Los Angeles, CA, USA
fYear :
1999
Firstpage :
144
Abstract :
Summary form only given. That helicon discharges produce higher plasma densities than unmagnetized inductively coupled plasmas (ICPs) is well known in the plasma processing community. A reason for the high RF coupling efficiency in these discharges has been suggested by Shamrai et al. (1997); namely, that helicon waves, though weakly damped themselves, can transfer their energy at the boundary to electrostatic electron cyclotron waves [called Trivelpiece-Gould (TG) modes in confined cylinders], and these, in turn, are rapidly damped as they propagate inward toward the axis. To test this hypothesis, we have performed an experiment to detect the TG waves directly.
Keywords :
damping; discharges (electric); helicons; plasma confinement; plasma density; plasma diagnostics; plasma electrostatic waves; plasma instability; Trivelpiece-Gould modes; boundary; confined cylinders; electrostatic electron cyclotron waves; energy transfer; helicon discharges; helicon waves; plasma densities; plasma processing community; unmagnetized inductively coupled plasmas; wave propagation; weakly damped waves; Cyclotrons; Electrons; Electrostatics; Performance evaluation; Plasma confinement; Plasma density; Plasma materials processing; Plasma waves; Radio frequency; Testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 1999. ICOPS '99. IEEE Conference Record - Abstracts. 1999 IEEE International Conference on
Conference_Location :
Monterey, CA, USA
ISSN :
0730-9244
Print_ISBN :
0-7803-5224-6
Type :
conf
DOI :
10.1109/PLASMA.1999.829384
Filename :
829384
Link To Document :
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