DocumentCode
1709485
Title
Detection of Trivelpiece-Gould modes in helicon discharges
Author
Blackwell, D.D. ; Madziwa, T.G. ; Armush, D. ; Chen, Francis F.
Author_Institution
California Univ., Los Angeles, CA, USA
fYear
1999
Firstpage
144
Abstract
Summary form only given. That helicon discharges produce higher plasma densities than unmagnetized inductively coupled plasmas (ICPs) is well known in the plasma processing community. A reason for the high RF coupling efficiency in these discharges has been suggested by Shamrai et al. (1997); namely, that helicon waves, though weakly damped themselves, can transfer their energy at the boundary to electrostatic electron cyclotron waves [called Trivelpiece-Gould (TG) modes in confined cylinders], and these, in turn, are rapidly damped as they propagate inward toward the axis. To test this hypothesis, we have performed an experiment to detect the TG waves directly.
Keywords
damping; discharges (electric); helicons; plasma confinement; plasma density; plasma diagnostics; plasma electrostatic waves; plasma instability; Trivelpiece-Gould modes; boundary; confined cylinders; electrostatic electron cyclotron waves; energy transfer; helicon discharges; helicon waves; plasma densities; plasma processing community; unmagnetized inductively coupled plasmas; wave propagation; weakly damped waves; Cyclotrons; Electrons; Electrostatics; Performance evaluation; Plasma confinement; Plasma density; Plasma materials processing; Plasma waves; Radio frequency; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1999. ICOPS '99. IEEE Conference Record - Abstracts. 1999 IEEE International Conference on
Conference_Location
Monterey, CA, USA
ISSN
0730-9244
Print_ISBN
0-7803-5224-6
Type
conf
DOI
10.1109/PLASMA.1999.829384
Filename
829384
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