Title :
IC-compatible optical sensor for adaptive optics
Author :
Monteiro, D. W de Lima ; Vdovin, G. ; Loktev, M.
fDate :
6/23/1905 12:00:00 AM
Abstract :
We report on the development of an integrated Hartmann-Shack wavefront sensor implemented in the framework of CMOS technology, the most used for Integrated Circuit (IC) fabrication. The sensor consists of an array of 8×8 addressable quad-cells with an analog demultiplexer and sampling-rate controller integrated on-chip, and a customized microfabricated Hartmann mask to sample the incident light. The role of the sensor is to sense aberrations present in a light beam.
Keywords :
CMOS integrated circuits; aberrations; adaptive optics; integrated optoelectronics; microlenses; optical arrays; wavefront sensors; CMOS technology framework; aberrations sensing; adaptive optics; addressable quad-cells; analog demultiplexer; customized microfabricated Hartmann mask; incident light sampling; integrated Hartmann-Shack wavefront sensor; position-sensitive detectors; sampling-rate controller; sensor array; Adaptive optics; CMOS integrated circuits; Lenses; Microoptics; Microwave integrated circuits; Optical distortion; Optical sensors; Photonic integrated circuits; Position sensitive particle detectors; Sensor arrays;
Conference_Titel :
Microwave and Optoelectronics Conference, 2001. IMOC 2001.Proceedings of the 2001 SBMO/IEEE MTT-S International
Print_ISBN :
0-7803-7065-1
DOI :
10.1109/SBMOMO.2001.1008816
