Feature-based statistical analysis for rapid yield estimation of microwave structures

A technique for rapid yield estimation of microwave structures is proposed. Instead of analyzing the entire response of the structure of interest, only the set of suitably selected feature points is being modeled and utilized to determine whether the response satisfies or violates given performance specifications. By exploiting the almost linear dependence of the feature points on the designable parameters, reliable yield estimation can be realized at low computational cost. Verification using conventional Monte Carlo analysis based on repetitive EM simulations is also provided.