DocumentCode :
1711458
Title :
Study of the LTE departure in a low pressure supersonic plasma jet in Ar-H/sub 2/ and in Ar-N/sub 2/-H/sub 2/ mixture
Author :
Rajabian, M. ; Vacquie, S. ; Gravelle, D.V.
Author_Institution :
CRTP, Sherbrooke Univ., Que., Canada
fYear :
1999
Firstpage :
193
Abstract :
Summary form only given. Plasma torches at low pressure and controlled atmosphere are used in major applications for the production and processing of materials due to their potential for high performance, and low contamination. A good knowledge of the plasma parameters is necessary, particularly for the design of high-performance mathematical models that avoid the building of expensive prototypes for performance assessment. The present work is undertaken on a DC plasma torch operating over a wide pressure range (8 kPa to 100 kPa) at an arc power fixed at 17.5 kW. Emission spectroscopy diagnostics was carried out for determining temperature, electron and particle density profiles in two gas mixtures: Ar-N/sub 2/-H/sub 2/ with flow rates of 40, 10, and 1 slpm respectively, and Ar-H/sub 2/ with input flow rates of 35 and 7 slpm respectively. The electron temperature was determined by using a Boltzmann diagram of Ar spectral lines. The absolute values of the intensity of these lines, of the molecular bands and of the continuum was obtained by using a standard tungsten filament lamp. Local values were obtained by Abel transform. For the rotational temperature measurement, the first negative system of N/sub 2//sup +/ was used using a method that consists in comparing the experimental spectra and the simulated molecular bands. The N/sub 2//sup +/ population density as calculated by using the band head intensity (the integrated 1-26 P-branch lines). To measure the electron density, we used the broadening of the H/sub /spl beta// line of hydrogen by the Stark effect. The local profile of H/sub /spl beta// was obtained by Abel inversion of the integrated profiles for 25 wavelengths on either side of the peak.
Keywords :
argon; gas mixtures; hydrogen; nitrogen; plasma density; plasma diagnostics; plasma jets; plasma pressure; plasma torches; 17.5 kW; 8 to 100 kPa; Abel inversion; Abel transform; Ar spectral lines; Ar-H/sub 2/; Ar-H/sub 2/ mixture; Ar-N/sub 2/-H/sub 2/; Ar-N/sub 2/-H/sub 2/ mixture; Boltzmann diagram; DC plasma torch; H/sub /spl beta// line broadening; LTE departure; N/sub 2//sup +/; N/sub 2//sup +/ population density; Stark effect; arc power; continuum; controlled atmosphere; electron density measurement; electron density profiles; electron temperature; emission spectroscopy diagnostics; first negative system; high-performance mathematical models; integrated P-branch lines; line intensity; local profile; low contamination levels; low pressure supersonic plasma jet; molecular bands; particle density profiles; plasma parameters; plasma temperature; plasma torches; pressure range; rotational temperature measurement; simulated molecular bands; tungsten filament lamp; Atmosphere; Buildings; Contamination; Electrons; Mathematical model; Plasma applications; Plasma materials processing; Plasma temperature; Pressure control; Production;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 1999. ICOPS '99. IEEE Conference Record - Abstracts. 1999 IEEE International Conference on
Conference_Location :
Monterey, CA, USA
ISSN :
0730-9244
Print_ISBN :
0-7803-5224-6
Type :
conf
DOI :
10.1109/PLASMA.1999.829474
Filename :
829474
Link To Document :
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