DocumentCode

1711730

Title

Characterizations of (SiO,Cr_1-x)_yN_1-y thin film resistors for integrated passive application

Author

Wu, Fan ; Morris, James E.

Author_Institution

Medtronic, Inc.

fYear

2003

Firstpage

161

Lastpage

166

Keywords

Atomic force microscopy; Conductivity; Costs; Nitrogen; Resistors; Sheet materials; Sputtering; Stability; Temperature; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Components and Technology Conference, 2003. Proceedings. 53rd

ISSN

0569-5503

Print_ISBN

0-7803-7791-5

Type

conf

DOI

10.1109/ECTC.2003.1216272

Filename

1216272