A h-band reflective-type phase shifter MMIC for ISM-Band applications

This paper describes the design and characterization of a reflective-type phase shifter for ISM-Band applications. The center frequency of the proposed phase shifter is in the high millimeter-wave frequency range at 250 GHz. On-wafer measurements showed a relative phase shift of 170° at the center frequency. An absolute bandwidth of 10GHz is observed, in which the phase shifter shows only little gain versus phase variation. An insertion loss of -12.5 ±1 dB at 250GHz over all phase states is measured while the input and output return loss are better than 10 dB. The chip size is only 0.75 × 0.75mm² including RF- and DC-probing pads. The phase and amplitude characteristics of the phase shifter are investigated and the theoretical impact on a phased array is presented.