Title :
Design & development of a new thermally stable high vacuum IR bolometer package
Author :
Premachandran, C.S. ; Khan, Navas ; Zhang, Xiaowu ; Choong, Chong Ser ; Chai, T.C.
Author_Institution :
Institute of Microelectronics
Keywords :
Bolometers; Circuits; Design optimization; Germanium; Micromechanical devices; Optical pulse generation; Packaging; Temperature control; Temperature sensors; Thermal conductivity;
Conference_Titel :
Electronic Components and Technology Conference, 2003. Proceedings. 53rd
Print_ISBN :
0-7803-7791-5
DOI :
10.1109/ECTC.2003.1216307