• DocumentCode
    1712595
  • Title

    Homogeneous integration of off the shelf silicon-based ICs on a silicon substrate

  • Author

    Balseanu, Mihaela ; Duster, Jon S. ; Kornegay, K.T.

  • Author_Institution
    Cornell University
  • fYear
    2003
  • Firstpage
    397
  • Lastpage
    402
  • Keywords
    Etching; Integrated circuit interconnections; Integrated circuit technology; Packaging; Polymers; Silicon; Substrates; Temperature; Thermal conductivity; Thermal expansion;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Components and Technology Conference, 2003. Proceedings. 53rd
  • ISSN
    0569-5503
  • Print_ISBN
    0-7803-7791-5
  • Type

    conf

  • DOI
    10.1109/ECTC.2003.1216308
  • Filename
    1216308
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1712595