DocumentCode
1712742
Title
The effect of carbonaceous deposit for NO/sub x/ dissociation by barrier discharge
Author
Fujiwara, Koji ; Itoyama, Katsutoshi ; Yanobe, T.
Author_Institution
Fac. of Educ., Nagasaki Univ., Japan
fYear
1999
Firstpage
217
Abstract
Summary form only given. A carbonaceous deposit was formed on the dielectric and the surface of electrodes, when the barrier discharge is generated in the mixed gas of CH/sub 4/ and N/sub 2/+NO. The authors have done this pre-treatment, changing the ratio of CH/sub 4/ and N/sub 2/+NO gases from 60 to 80%, under the condition of 500 to 700 Torr in pressure. After this pre-treatment was carried out, we introduced N/sub 2/+NO gas into the chamber. NO/sub x/ dissociation was done with 700 Torr of pressure in the chamber and 300 ml/min of flow rate. The authors investigated the effect of carbonaceous deposit and barrier discharge for NO/sub x/ dissociation. We measured mass spectra on NO/sub x/ by Q-mass. The dielectric is hard glass of 0.15 mm in thickness. The length of gap is 0.8 mm. An applied potential between electrodes was about 4,000 volts AC (peak value) and its frequency was 4.7 kHz.
Keywords
dissociation; mass spectra; nitrogen compounds; plasma chemistry; plasma diagnostics; plasma-wall interactions; 4.7 kHz; 4000 V; 500 to 700 torr; N/sub 2/-NO; N/sub 2/-NO mixture; N/sub 2/O; NO; NO/sub 2/; NO/sub x/; NO/sub x/ dissociation; applied potential; barrier discharge; carbonaceous deposit; dielectric; electrode surface; flow rate; mass spectra; methane; mixed gas; pre-treatment; Argon; Dielectric measurements; Electrodes; Furnaces; Heating; Iron; Plasma materials processing; Plasma measurements; Plasma sources; Surface discharges;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1999. ICOPS '99. IEEE Conference Record - Abstracts. 1999 IEEE International Conference on
Conference_Location
Monterey, CA, USA
ISSN
0730-9244
Print_ISBN
0-7803-5224-6
Type
conf
DOI
10.1109/PLASMA.1999.829521
Filename
829521
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