DocumentCode :
1714293
Title :
High tunability (Ba,Sr)TiO3 thin films on atomic layer deposited buffer layers for Si integration
Author :
Kim, Hyun-Suk ; Lim, Mi-Hwa ; Yang, Dae-Jin ; Kim, Ho-Gi
Author_Institution :
Dept. of Mater. Sci. & Eng., Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea
Volume :
3
fYear :
2005
Firstpage :
644
Abstract :
In this study, we report on Si integration of Ba0.6Sr0.4TiO3 (BST) thin film based microwave tunable devices by use of TiO2 films as microwave buffer layer between BST and Si substrates. TiO2 buffer layer were grown by atomic layer deposition (ALD) onto Si substrates followed by pulsed laser deposition (PLD) of BST thin films onto the TiO2 buffer layer. The interdigital capacitor (IDC) fabricated on BST films grown on TiO2/high resistivity Si substrates showed much enhanced tunability value of 33.2% while retaining an appropriate Q factor, as compared to 21% value obtained with BST films grown on MgO single crystal substrates. The microwave phase shifters were fabricated on BST thin films to investigate the potential feasibility of integrating BST films as microwave tunable devices. The phase shifter fabricated on BST films grown on TiO2/Si substrate showed better figure of merit (FOM) of 30.7°/dB, as compared to 12.1°/dB of BST/MgO structure. ALD grown TiO2 buffer layers enable successful integration of BST based microwave tunable devices onto high resistivity Si wafers.
Keywords :
atomic layer deposition; buffer circuits; buffer layers; integrated circuit manufacture; microwave integrated circuits; phase shifters; pulsed laser deposition; substrates; titanium compounds; Ba0.6Sr0.4TiO3; atomic layer deposited buffer layers; atomic layer deposition; interdigital capacitor fabrication; microwave buffer layer; microwave phase shifters; microwave tunable devices; phase shifter fabrication; pulsed laser deposition; substrates; thin films; wafers resistivity; Binary search trees; Buffer layers; Conductivity; Microwave devices; Pulsed laser deposition; Semiconductor films; Semiconductor thin films; Substrates; Thin film devices; Tunable circuits and devices;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electrical Insulating Materials, 2005. (ISEIM 2005). Proceedings of 2005 International Symposium on
Print_ISBN :
4-88686-063-X
Type :
conf
DOI :
10.1109/ISEIM.2005.193451
Filename :
1496255
Link To Document :
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