Title :
Nano-Opto-Electro-Mechanical devices based on silicon slot-waveguides structures
Author :
Almeida, Vilson R. ; Panepucci, Roberto R.
Author_Institution :
Inst. de Estudos Avancados, IEAv, Sao Jose dos Campos, Brazil
Abstract :
We present device applications for Nano-Opto-Electro-Mechanical System (NOEMS) structures based on the evanescent-wave bonding acting on silicon slot-waveguide structures. Useful all-optical and electrooptical functionalities are proposed, including: phase modulation, polarization mode dispersion, near-field probing and reconfigurable optical delay.
Keywords :
nanoelectromechanical devices; optical modulation; optical waveguides; phase modulation; evanescent-wave bonding; nano-opto-electro-mechanical devices; near-field probing; phase modulation; polarization mode dispersion; reconfigurable optical delay; silicon slot-waveguides structures; Nanoscale devices; Optical devices; Optical pumping; Optical refraction; Optical resonators; Optical sensors; Optical surface waves; Optical variables control; Optical waveguides; Silicon; NOEMS; evanescent wave-bonding; integrated optics; silicon photonics; slot-waveguide;
Conference_Titel :
Microwave and Optoelectronics Conference (IMOC), 2009 SBMO/IEEE MTT-S International
Conference_Location :
Belem
Print_ISBN :
978-1-4244-5356-6
Electronic_ISBN :
1679-4389
DOI :
10.1109/IMOC.2009.5427522
