Title :
CMOS-Based Capacitive Sensor Array Dedicated to Microfluidic Studies
Author :
Zadeh, Ebrahim Ghafar ; Sawan, Mohamad ; Jalali, Mohsen ; Therriault, Daniel
Author_Institution :
Ecole Polytech. de Montreal, Montreal
Abstract :
We present a novel technique to study the behavior of liquids in microfluidics. An array of capacitive sensors realized in CMOS circuitry is considered to detect the liquid in a channel integrated on top of CMOS chip. A microfluidic packaging procedure is described using a robotic-based fabrication process and the preliminary experimental results are reported. Also, the capacitive simulation results are displayed using finite-element based software.
Keywords :
CMOS integrated circuits; capacitive sensors; finite element analysis; microfluidics; sensor arrays; CMOS chip; CMOS circuitry; CMOS-based capacitive sensor array; finite-element based software; microfluidic packaging procedure; microfluidic study; robotic-based fabrication process; Bonding; Capacitive sensors; Electrodes; Epoxy resins; Fabrication; Ink; Microchannel; Microelectronics; Microfluidics; Sensor arrays;
Conference_Titel :
Computer Architecture for Machine Perception and Sensing, 2006. CAMP 2006. International Workshop on
Conference_Location :
Montreal, Que.
Print_ISBN :
978-1-4244-0685-2
Electronic_ISBN :
978-1-4244-0686-9
DOI :
10.1109/CAMP.2007.4350348
