MEMS-Based Electrostatic Actuated Scanner Dedicated for Ultrasound Sensors

Author

Hassan, Mohamad Hajj ; Sawan, Mohamad ; Peter, Yves-Alain

Author_Institution

Ecole Polytech. de Montreal, Montreal

fYear

2006

Firstpage

69

Lastpage

70

Abstract

This paper concerns the design and fabrication of new transducer movers dedicated to 3D ultrasound sensors. Our MEMS-based movers were designed using CoventorWare finite element software to maximize the sector and rotation scan angles. These movers are fabricated on silicon wafers using the standard PolyMUMPs process. The design includes both a scanner actuated using four trapezium electrodes and a scanner actuated using vertical comb fingers. According to the simulation results, the required voltage to actuate this latter is significantly less than that required to actuate the platform using electrodes.

Keywords

actuators; biomedical electrodes; echocardiography; finite element analysis; medical image processing; micromechanical devices; optical sensors; 3D ultrasound sensors; CoventorWare finite element software; MEMS-based electrostatic actuated scanner; medical imaging technique; micromechanical devices; silicon wafers; standard PolyMUMPs process; trapezium electrodes; ultrasound echography; vertical comb fingers; Electrodes; Electrostatics; Fabrication; Fingers; Finite element methods; Process design; Silicon; Ultrasonic imaging; Ultrasonic transducers; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Computer Architecture for Machine Perception and Sensing, 2006. CAMP 2006. International Workshop on

Conference_Location

Montreal, Que.

Print_ISBN

978-1-4244-0685-2

Electronic_ISBN

978-1-4244-0686-9

Type

conf

DOI

10.1109/CAMP.2007.4350355

Filename

4350355