Title :
MEMS-Based Electrostatic Actuated Scanner Dedicated for Ultrasound Sensors
Author :
Hassan, Mohamad Hajj ; Sawan, Mohamad ; Peter, Yves-Alain
Author_Institution :
Ecole Polytech. de Montreal, Montreal
Abstract :
This paper concerns the design and fabrication of new transducer movers dedicated to 3D ultrasound sensors. Our MEMS-based movers were designed using CoventorWare finite element software to maximize the sector and rotation scan angles. These movers are fabricated on silicon wafers using the standard PolyMUMPs process. The design includes both a scanner actuated using four trapezium electrodes and a scanner actuated using vertical comb fingers. According to the simulation results, the required voltage to actuate this latter is significantly less than that required to actuate the platform using electrodes.
Keywords :
actuators; biomedical electrodes; echocardiography; finite element analysis; medical image processing; micromechanical devices; optical sensors; 3D ultrasound sensors; CoventorWare finite element software; MEMS-based electrostatic actuated scanner; medical imaging technique; micromechanical devices; silicon wafers; standard PolyMUMPs process; trapezium electrodes; ultrasound echography; vertical comb fingers; Electrodes; Electrostatics; Fabrication; Fingers; Finite element methods; Process design; Silicon; Ultrasonic imaging; Ultrasonic transducers; Voltage;
Conference_Titel :
Computer Architecture for Machine Perception and Sensing, 2006. CAMP 2006. International Workshop on
Conference_Location :
Montreal, Que.
Print_ISBN :
978-1-4244-0685-2
Electronic_ISBN :
978-1-4244-0686-9
DOI :
10.1109/CAMP.2007.4350355
