Title :
A 1.1 THz micromachined on-wafer probe
Author :
Bauwens, Matthew F. ; Alijabbari, Naser ; Lichtenberger, Arthur W. ; Barker, N.S. ; Weikle, Robert M.
Author_Institution :
Dominion MicroProbes, Inc., Charlottesville, VA, USA
Abstract :
This paper presents a micromachined probe for on-wafer measurements of circuits in the WR-1.0 waveguide band (0.75 - 1.1 THz). The probe shows a measured insertion loss of less than 7 dB and return loss of greater than 15 dB over most of the band. These are the first reported on-wafer measurements above 1 THz.
Keywords :
millimetre wave integrated circuits; millimetre wave measurement; submillimetre wave integrated circuits; submillimetre wave measurement; circuit measurement; frequency 0.75 THz to 1.1 THz; insertion loss measurement; micromachined on wafer probe; return loss measurement; Coplanar waveguides; Data communication; Delays; Digital multimedia broadcasting; Indium phosphide; Loss measurement; Micromachining; probes; submillimeter wave integrated circuits; submillimeter wave measurements;
Conference_Titel :
Microwave Symposium (IMS), 2014 IEEE MTT-S International
Conference_Location :
Tampa, FL
DOI :
10.1109/MWSYM.2014.6848607
