Title :
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems
Abstract :
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Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Conference_Location :
Seoul, South Korea
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496334