The 2D feedback conveyance with ciliary actuator arrays

Author

Ataka, Manabu ; Legrand, B. ; Buchaillot, Lionel ; Collard, Dominique ; Fujita, Hiroyuki

Author_Institution

Inst. of Ind. Sci., Univ. of Tokyo, Japan

Volume

1

fYear

2005

Firstpage

31

Abstract

This paper presents a methodology to construct a microsystem destined to evaluate several kinds of control schemes for arrayed (i.e. cell-structured) microactuators. Conceptually, the system is composed of a mechanical layer, sensing layer and control layer. This time, we built and operated an emulation system to examine the efficiency of various feedback control schemes; in the system, the ciliary actuator arrays were used for the mechanical layer, a CCD camera for the sensing layer and programmable logic device (PLD) for the control layer.

Keywords

CCD image sensors; feedback; microactuators; programmable logic arrays; 2D feedback conveyance; CCD camera; PLD; arrayed microactuators; cell-structured microactuators; ciliary actuator arrays; control layer; feedback control; mechanical layer; microsystem; programmable logic device; sensing layer; Actuators; Charge coupled devices; Charge-coupled image sensors; Control systems; Feedback; Intelligent sensors; Mechanical sensors; Programmable logic arrays; Sensor arrays; Sensor systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1496351

Filename

1496351