Title :
Scalable modeling of on-chip spiral inductors including metal fill parasitics
Author :
Shilimkar, Vikas S. ; Gaskill, Steven G. ; Weisshaar, Andreas
Author_Institution :
Sch. of Electr. Eng. & Comput. Sci., Oregon State Univ., Corvallis, OR, USA
Abstract :
We propose a fast and scalable method to model spiral inductors in the presence of metal fill. The method is based on the PEEC technique combined with an extension of methods to incorporate metal fill parasitic effects in spiral inductors. For representative test cases we observe a degradation in peak quality factor of 20 - 30% due to metal fill. The errors in the estimation of peak quality factor are up to 6.0% without metal fill and up to 7.4% with metal fill.
Keywords :
Q-factor; inductors; PEEC technique; metal fill parasitic effects; on-chip spiral inductors; peak quality factor; scalable modeling; Capacitance; Engines; Finite element analysis; Metals; Semiconductor device modeling; capacitance modeling; eddy-current loss modeling; metal fill; on-chip spiral inductors;
Conference_Titel :
Microwave Symposium (IMS), 2014 IEEE MTT-S International
Conference_Location :
Tampa, FL
DOI :
10.1109/MWSYM.2014.6848648
