Stiction drive operation of micromotors: direct and reverse rotation control

This submission presents friction driven angular micromotors that demonstrate both clockwise (CW) and counterclockwise (CCW) rotations with a single set of mechanical converters. Fabrication technology is based on surface micromachining of polycrystalline silicon layers in thin films. Rotor diameter is 125 μm and converter vibration is obtained by the use of combdrive actuators. Rotation direction depends on the operating conditions (driving amplitude and frequency of the actuators) that lead to either pure friction or to friction and stiction between the converters and the rotor. Potential applications for driving micromechanisms will benefit from a high available torque at low speeds.