Micro XY-stages with spider-leg actuators for 2-dimensional optical scanning

We propose a micromachined XY stage consisting of eight ´L´ shaped (spider-leg) suspension springs and rotational comb-drive actuators for a 2-dimensional microlens scanner. The micro XY stage was fabricated by two deep RIE and the lenses feature a high fill factor. The XY stage moved more than 55 μm independently in the X and Y directions with applied voltage of 40 V, which was sufficient for an 4×4 optical cross connect (OXC) with the lens pitch of 2 mm. The optical coupling loss between the faced microlens pair shows about 35-39 dB.