Title :
A MEMS hybrid inertial sensor based on convection heat transfer
Author :
Zhu, Rong ; Su, Yan ; Ding, Henggao
Author_Institution :
Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing, China
Abstract :
The paper presents a micro electromechanical hybrid inertial sensor based on convection heat transfer. The sensor configuration consists of a small silicon etched cavity, a suspended central heater and four suspended thermistors, all of which are packaged in a hermetic chamber. The sensor has a configuration similar to those of known thermal accelerometers, but is different because it can sense dual axis accelerations and single axis angular rate. The working principle of the sensor, the numerical simulations of the convection flow and results of a first experiment are presented.
Keywords :
acceleration measurement; angular velocity measurement; convection; hermetic seals; inertial systems; microsensors; thermistors; MEMS hybrid inertial sensor; convection heat transfer; dual axis accelerations; hermetic chamber; micro electromechanical hybrid inertial sensor; silicon etched cavity; single axis angular rate; suspended central heater; suspended thermistors; thermal accelerometers; Acceleration; Accelerometers; Electromechanical sensors; Etching; Heat transfer; Micromechanical devices; Packaging; Silicon; Thermal sensors; Thermistors;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496372
