The first sub-deg/hr bias stability, silicon-microfabricated gyroscope

Author

Choi, Byoung-Doo ; Park, Sanglun ; Ko, Hyoungho ; Paik, Seung-Joon ; Park, Yonghwa ; Lim, Geunwon ; Lee, Ahra ; Lee, Sang Chul ; Carr, W. ; Setiadi, Dadi ; Mozulay, Robert ; Dong-Il Cho

Author_Institution

Sch. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., South Korea

Volume

1

fYear

2005

Firstpage

180

Abstract

The first sub-deg/hr bias stability gyroscope is fabricated in single crystal silicon using the SBM (sacrificial bulk micromachining) process. The quadrature error is a major concern in MEMS gyroscopes for high performance. To minimize the quadrature error, the fabricated gyroscope has a very flat bottom surface, which gives a highly symmetrical proof mass, and springs, which, in turn, provide high performance levels with significantly reduced quadrature error. The fabricated gyroscope has a bandwidth of 58 Hz, and 4-hr bias stability of 0.3 deg/hr.

Keywords

gyroscopes; mechanical stability; micromachining; micromechanical devices; minimisation; silicon; 58 Hz; MEMS gyroscopes; Si; flat bottom surface; gyroscope bias stability; quadrature error minimization; sacrificial bulk micromachining; silicon-microfabricated gyroscope; single crystal silicon; springs; symmetrical proof mass; Computer science; Crystallization; Fabrication; Gyroscopes; Micromechanical devices; Rough surfaces; Silicon; Springs; Stability; Surface roughness;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1496388

Filename

1496388