Title :
New surface micromachined angular rate sensor for vehicle stabilizing systems in automotive applications
Author :
Gómez, U.M. ; Kuhlmann, B. ; Classen, J. ; Bauer, W. ; Lang, C. ; Veith, M. ; Esch, E. ; Frey, J. ; Grabmaier, F. ; Offterdinger, K. ; Raab, T. ; Faisst, H.-J. ; Willig, R. ; Neul, R.
Author_Institution :
Bus. Unit Automotive Electron., Robert Bosch GmbH, Reutlingen, Germany
Abstract :
Current developments in vehicle dynamics control systems and future advanced high performance vehicle stabilizing systems demand higher performance of the inertial signals of the vehicle´s dynamics, especially the angular rate signals: higher accuracy and better signal to noise ratio, high signal refresh rates, higher robustness and insensitivity against external interference, higher system availability and reliability, easier applicability (e.g. additional measuring axes). This paper presents a third generation angular rate sensor cluster MM3.x suitable for high volume production, meeting those demands. Design concepts of the core component - the new angular rate sensor module SMG - are unveiled, giving it outstanding functional performance compared to similar surface micromachined gyroscopes.
Keywords :
angular velocity measurement; automotive electronics; gyroscopes; inertial systems; microsensors; MEMS; automotive sensors; capacitive type coriolis vibratory gyroscope; high volume production; inertial sensors; sensor cluster; surface micromachined angular rate sensor; vehicle dynamics control systems; vehicle stabilizing systems; Automotive applications; Availability; Control systems; Intelligent vehicles; Interference; Noise robustness; Robust control; Sensor systems and applications; Signal to noise ratio; Vehicle dynamics;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496389
