Nonlinear interaction of microwave and magnetoactive plasma: hysteresis phenomena and application

Summary form only given, as follows. A method for calculating the interaction of a microwave with a plane layer of a magnetoactive low-pressure plasma is presented. In this paper, the plasma layer is situated between a plane dielectric layer and a plane metal screen. The calculation model contains the microwave energy balance, particle balance and electron energy balance. The numerical calculations of the nonlinear interaction of the incident plane microwave and the plane plasma layer show that there are hysteresis phenomena when the external magnetic field and intensity of the incident microwave are changed. The cause of these hysteresis phenomena is considered. As a result of this investigation, the estimations for conditions of the plasma uniformity near the surface being worked in a real microwave plasmatron for giant integrated circuits and printed technology have been considered.