Title :
A hybrid-statistical approach for accurate characterization of MEMS on complex platforms
Author :
Ozdemir, T. ; Sabet, K.F. ; Yasan, E. ; Vega, M.C. ; Ebel, J.L. ; Creech, G.L. ; Lesniak, C.D. ; Katehi, L.P.B. ; Sarabandi, K.
Author_Institution :
EMAG Technol. Inc, Ann Arbor, MI, USA
Abstract :
Micro-electromechanical systems (MEMS) are used in a diverse group of fields. In this paper, we are concerned with the communication and sensing applications, particularly in connection with the Reconfigurable Aperture Antenna (RECAP) project. We present a finite element method (FEM)-based approach to characterizing MEMS devices in the presence of radiators. We concentrate on modeling the MEMS switches since this problem has its own challenges. By modeling, we mean extracting a lumped element model consisting of resistors, inductors and capacitors.
Keywords :
finite element analysis; lumped parameter networks; micromechanical devices; microwave switches; multifrequency antennas; FEM; MEMS; RECAP project; Reconfigurable Aperture Antenna project; capacitors; communication applications; finite element method; hybrid-statistical approach; inductors; lumped element model; micro-electromechanical systems; resistors; sensing applications; Aerospace electronics; Bridge circuits; Conductors; Coplanar waveguides; Laboratories; Microelectromechanical devices; Micromechanical devices; Optical filters; Shunt (electrical); Switches;
Conference_Titel :
Antennas and Propagation Society International Symposium, 2001. IEEE
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7070-8
DOI :
10.1109/APS.2001.960184
