Quartz-crystal cantilevered resonator for nanometric sensing

Author

Lin, Yu-Ching ; Ono, Takahito ; Esashi, Masayoshi

Author_Institution

Graduate Sch. of Eng., Tohoku Univ., Sendai, Japan

Volume

1

fYear

2005

Firstpage

247

Abstract

A thin rectangle cantilevered resonator of AT-cut quartz crystal has been developed for force and nanometric sensing. The cantilevers with thicknesses of 15∼27 μm were fabricated by deep reactive ion etching (deep-RIE). Its force sensing principle using the quartz cantilever is based on the resonant frequency changes when an external force is applied. Shear vibration in the direction of the electrical axis can be piezoelectrically excited and detected. Also flexural and torsional vibrations can be excited and piezoelectrically detected despite the weak electromechanical coupling. Using flexural and torsional modes, scanning probe microscopy for topographic imaging is demonstrated.

Keywords

crystal resonators; crystallographic shear; force sensors; microsensors; nanotechnology; quartz; scanning probe microscopy; sputter etching; vibrations; 15 to 27 micron; AT-cut quartz crystal; deep reactive ion etching; deep-RIE; flexural vibrations; force sensing; nanometric sensing; piezoelectric detection; piezoelectric excitation; quartz-crystal cantilevered resonator; resonant frequency changes; scanning probe microscopy; shear vibration; topographic imaging; torsional vibrations; Chromium; Frequency measurement; Gold; Lithography; Nickel; Radio frequency; Resonant frequency; Solid state circuits; Thickness measurement; Vibration measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1496403

Filename

1496403