Title :
An on-chip autonomous microfluidic cooling system
Author :
Agarwal, Abhishek K. ; Sridharamurthy, Sudheer S. ; Beebe, David J. ; Jiang, Hongrui
Author_Institution :
Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA
Abstract :
An on-chip self-contained autonomous microfluidic cooling system, driven by a constant external rotating magnetic stirrer, has been developed using liquid-phase photopolymerization and nickel electroplating. A temperature-sensitive hydrogel, that acts in a way similar to an automotive clutch, provides the autonomous functionality. By controlling the rotation of the nickel impeller, the hydrogel effectively controls the pumping of cold water to cool the system when temperatures are high. Once cooled, the system autonomously stops pumping. The autonomous functionality and cooling effect of the system were observed at various heater temperature setpoints. Cooling temperatures ranging between 1.6°C and 4.0°C were exhibited by the system.
Keywords :
clutches; cooling; electromagnetic actuators; electroplating; microactuators; microfluidics; micromachining; micropumps; polymerisation; Ni; cold water pump; fabrication process; liquid-phase photopolymerization; magnetic actuator; nickel electroplating; on-chip autonomous microfluidic cooling system; programmable clutch mechanism; rotating magnetic stirrer; temperature-sensitive hydrogel; Automotive engineering; Control systems; Cooling; Impellers; Magnetic liquids; Microfluidics; Nickel; System-on-a-chip; Temperature control; Temperature distribution;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496431