Tunable micro-aspherical lens manipulated by 2D electrostatic forces

Author

Chen, Chang-Wei ; Tseng, Fan-Gang

Author_Institution

Inst. of Microelectromech. Syst., Nat. Tsing Hua Univ., Hsinchu, Taiwan

Volume

1

fYear

2005

Firstpage

376

Abstract

A novel method to manipulate or fabricate an aspherical micro lens from photo curable polymer is proposed. Two dimensional forces, produced by electro-wetting and electrostatic forces, were applied to shape polymer liquid from a hemisphere into a paraboloid or near cone shape. As a result, the Strehl ratio for this lens can be varied from 0.0076, in the spherical shape, into 0.8362, in the near paraboloid shape, suitable for optical applications desiring lenses with high numerical apertures and resolution.

Keywords

aspherical optics; electric fields; microlenses; optical fabrication; optical polymers; 2D electrostatic forces; Strehl ratio; aspherical micro lens; cone shape; electro-wetting forces; electrostatic forces; hemispherical shape; numerical aperture; paraboloid shape; photo curable polymer; polymer liquid; resolution; tunable micro-aspherical lens; Biomedical optical imaging; Electrostatics; Lenses; Microoptics; Optical design; Optical refraction; Optical sensors; Optical surface waves; Polymers; Shape;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1496434

Filename

1496434