Title :
Tunable micro-aspherical lens manipulated by 2D electrostatic forces
Author :
Chen, Chang-Wei ; Tseng, Fan-Gang
Author_Institution :
Inst. of Microelectromech. Syst., Nat. Tsing Hua Univ., Hsinchu, Taiwan
Abstract :
A novel method to manipulate or fabricate an aspherical micro lens from photo curable polymer is proposed. Two dimensional forces, produced by electro-wetting and electrostatic forces, were applied to shape polymer liquid from a hemisphere into a paraboloid or near cone shape. As a result, the Strehl ratio for this lens can be varied from 0.0076, in the spherical shape, into 0.8362, in the near paraboloid shape, suitable for optical applications desiring lenses with high numerical apertures and resolution.
Keywords :
aspherical optics; electric fields; microlenses; optical fabrication; optical polymers; 2D electrostatic forces; Strehl ratio; aspherical micro lens; cone shape; electro-wetting forces; electrostatic forces; hemispherical shape; numerical aperture; paraboloid shape; photo curable polymer; polymer liquid; resolution; tunable micro-aspherical lens; Biomedical optical imaging; Electrostatics; Lenses; Microoptics; Optical design; Optical refraction; Optical sensors; Optical surface waves; Polymers; Shape;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496434
