DocumentCode
1719268
Title
Preliminary design and experimental evaluation of carbide field emitters in mTorr pressure environments
Author
Marrese, C.M. ; Mackie, W.A. ; Gallimore, A.C.
Author_Institution
Michigan Univ., Ann Arbor, MI, USA
fYear
1997
Firstpage
123
Abstract
Summary form only given. This report describes an on-going effort to develop field emitter cathodes for mTorr-level discharges. Hafnium carbide and zirconium carbide emitters were used for their hardness, chemical inertness and low work functions. Single HfC emitters were tested in oxygen at mTorr pressures. They showed resistance to damage due to backsputtering even at relatively large extraction voltages. Emitter-gate electrode configurations were then optimized for mTorr pressure environments to prevent catastrophic failure of the arrays from arcing. The results of the design analysis, emission measurements under various gases and pressures, and experimental evaluations of the design are presented in this report.
Keywords
cathodes; discharges (electric); vacuum microelectronics; HfC emitters; ZrC emitters; arcing; backsputtering; carbide field emitters; damage resistance; design analysis; discharges; emission measurements; emitter-gate electrode configurations; experimental evaluation; mTorr pressure environments; pressure; work function; Cathodes; Chemicals; Electrical resistance measurement; Electrodes; Gases; Hafnium; Hybrid fiber coaxial cables; Testing; Voltage; Zirconium;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1997. IEEE Conference Record - Abstracts., 1997 IEEE International Conference on
Conference_Location
San Diego, CA, USA
ISSN
0730-9244
Print_ISBN
0-7803-3990-8
Type
conf
DOI
10.1109/PLASMA.1997.604368
Filename
604368
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