• DocumentCode
    1719268
  • Title

    Preliminary design and experimental evaluation of carbide field emitters in mTorr pressure environments

  • Author

    Marrese, C.M. ; Mackie, W.A. ; Gallimore, A.C.

  • Author_Institution
    Michigan Univ., Ann Arbor, MI, USA
  • fYear
    1997
  • Firstpage
    123
  • Abstract
    Summary form only given. This report describes an on-going effort to develop field emitter cathodes for mTorr-level discharges. Hafnium carbide and zirconium carbide emitters were used for their hardness, chemical inertness and low work functions. Single HfC emitters were tested in oxygen at mTorr pressures. They showed resistance to damage due to backsputtering even at relatively large extraction voltages. Emitter-gate electrode configurations were then optimized for mTorr pressure environments to prevent catastrophic failure of the arrays from arcing. The results of the design analysis, emission measurements under various gases and pressures, and experimental evaluations of the design are presented in this report.
  • Keywords
    cathodes; discharges (electric); vacuum microelectronics; HfC emitters; ZrC emitters; arcing; backsputtering; carbide field emitters; damage resistance; design analysis; discharges; emission measurements; emitter-gate electrode configurations; experimental evaluation; mTorr pressure environments; pressure; work function; Cathodes; Chemicals; Electrical resistance measurement; Electrodes; Gases; Hafnium; Hybrid fiber coaxial cables; Testing; Voltage; Zirconium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1997. IEEE Conference Record - Abstracts., 1997 IEEE International Conference on
  • Conference_Location
    San Diego, CA, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-3990-8
  • Type

    conf

  • DOI
    10.1109/PLASMA.1997.604368
  • Filename
    604368