Title :
PDMS membranes with 2D PhC for LEDs far-field pattern modification
Author :
Suslik, L. ; Pudis, D. ; Gaso, P. ; Jandura, D. ; Nolte, R. ; Hronec, Pavol ; Schaaf, P. ; Kovac, J. ; Lettrichova, Ivana ; Berezina, Sofia
Author_Institution :
Dept. of Phys., Univ. of Zilina, Zilina, Slovakia
Abstract :
In this paper we present new imprinting process for fabrication of PhC structures on surface of thin PDMS membranes. We used interference lithography in combination with imprinting technique. 2D PhC surface relief structures of period 495 nm were patterned in thin PDMS membranes with depth up to 100 nm. Patterned PDMS membranes placed on different optoelectronic device surface could modify the final optical properties.
Keywords :
integrated optics; integrated optoelectronics; light emitting diodes; membranes; optical fabrication; optical polymers; photolithography; photonic crystals; 2D PhC surface relief structures; LED; PDMS membranes; far-field pattern modification; imprinting technique; interference lithography; optoelectronic device surface; Light emitting diodes; Photonics; Polymers; Substrates; Surface treatment; interference lithography; light emitting diode; photonic crystal structure; polydimethylsiloxane;
Conference_Titel :
ELEKTRO, 2014
Conference_Location :
Rajecke Teplice
Print_ISBN :
978-1-4799-3720-2
DOI :
10.1109/ELEKTRO.2014.6848985
